| 摘要 |
PURPOSE: A thermal CVD equipment of carbon nanotubes or carbon nanofibers using plasma generator is provided to produce carbon nanotubes or nanofibers with uniform thickness and length in large quantities, and greatly improve purity and yield compared with a conventional system using heat reaction. CONSTITUTION: A thermal CVD equipment of carbon nanotubes or nanofibers equipped with a plasma generator improves purity and yield of carbon nanotubes or nanofibers by vaporizing metal catalyst-source solution and carbon source-solution and changing vaporized sources to plasma constituents(ion, radical, electron mixture, etc.). The vapor phase grow system contains the parts of: four carbon-source gas providers(101-104); low temperature region equipped with a vaporizer(209) for organic metal catalyst-source solution and solid organic compound solution, and high density and low temperature plasma generator on the upper side inside a reaction furnace(301); high temperature vapor phase synthesis region; carbon nanotubes or nanofibers collector; discharge fan and vacuum pump. The carbon-source solution, organic solvent, is methanol, ethanol, propanol, benzene, toluene, cyclohexane, xylene or chloroform. The metal catalyst-source solution is obtained by dissolving organic metal catalyst-sources such as Fe(CO)5, Ni(CO)5, CrH8N2O4, CrH4NO8S2, C4H6CrO4, C10H10Fe and C6H12FeN9, etc. in the carbon source solution. The carbon nanotubes or nanofibers are produced by dissolving organic compound(coal tar), phthalocyanine, surfactant in the solvent(or mixed solvent).
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