Ultrasonic bonding machine

摘要

The machine has a holder (3) with a rotation support unit for mounting a resonator (4) having a number of bonding work faces (8), and an angle indexing unit. A mounting table (7) makes a follow-up movement by a bearing to ensure that the bonding work face becomes parallel to a top face of the table, since overlapped workpieces (W) are sandwiched between the bonding work face of the resonator and the table. The angle indexing unit fixes the resonator at an indexing angle in a circumferential direction with an axis in a vibration transmission direction of the bonding work faces as the center. The bearing is composed of a spherical projection portion and a spherical depression portion.