发明名称 Semiconductor device, manufacturing method for semiconductor device and mounting method for the same
摘要 A semiconductor device in accordance with the present invention reduces cracks occurring in a junction between a semiconductor device and a mounting substrate due to a heat stress when the semiconductor device is mounted on a printed circuit board or the like. The semiconductor device has a semiconductor element having a thickness of 200 mum or less, an electrode pad formed on the semiconductor element, a post electrically connected to the electrode pad, and a sealing resin for sealing a surface where circuitry is formed and the post. Furthermore, a manufacturing method for a semiconductor device in accordance with the present invention includes a step for forming an electrode pad on a main surface of a semiconductor wafer, a step for forming a post to be connected to the electrode pad, a step for resin-sealing the main surface of the semiconductor wafer and the post, a step for forming a groove from a surface of the resin to a predetermined depth of the semiconductor wafer, and a step for polishing a rear surface of the semiconductor wafer to a bottom of the groove and dividing the semiconductor wafer into individual semiconductor devices.
申请公布号 US6680535(B2) 申请公布日期 2004.01.20
申请号 US20030386490 申请日期 2003.03.13
申请人 OKI ELECTRIC INDUSTRY CO., LTD. 发明人 OHUCHI SHINJI;SHIRAISHI YASUSHI
分类号 H01L21/301;H01L21/304;H01L21/56;H01L21/68;H01L23/02;H01L23/31;(IPC1-7):H01L23/48 主分类号 H01L21/301
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