| 摘要 |
PROBLEM TO BE SOLVED: To provide an adjusting and fixing mechanism device which is little in deviation after adjustment and deviation against oscillation. SOLUTION: Moving positions of the X axis and the Y axis of a moving table are adjusted with respect to a fixed base, and a first bearing-shaped holder 25 is pressed to the X axis in a direction perpendicular to the X axis by a first holder fixing stopper 27, and first deviation preventing pin screws 28 are pressed to the X axis from the first bearing-shaped holder 25 in a direction perpendicular to the X axis, and a second bearing-shaped holder 29 is pressed to the Y axis in a direction perpendicular to the Y axis by a second holder fixing stopper 30, and second deviation preventing pin screws 31 are pressed to the Y axis from the second bearing-shaped holder 29 in a direction perpendicular to the Y axis, and thus the moving positions of the X axis and the Y axis are fixed and held. COPYRIGHT: (C)2004,JPO |
