| 摘要 |
PROBLEM TO BE SOLVED: To prevent the scattering of processing solution in replenishing a processing tank with replenisher and to prevent the replenisher remaining in a duct line from being deteriorated. SOLUTION: A replenishing nozzle 182 provided in the width extended part 200 of a developing tank 54 is bent in almost U-shape, and arranged to extend over a side wall 208. A piping 180A from a replenishing pump is connected to one end of the nozzle 182, and the other end of the nozzle 182 is inserted in developer in the width extended part 200 so that an aperture end 210 at its edge may be lower than the lower limit level of the liquid level of the developer. Thus, the undiluted solution of developing replenisher is discharged to the developer from the nozzle 182 when it is supplied to the developing tank. Since the opening end is inserted in the developer when the supply of the undiluted solution is stopped, a situation that air enters the nozzle 182 and deteriorates the undiluted solution remaining in the nozzle 182 is prevented. COPYRIGHT: (C)2003,JPO
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