Method for description of the time response of actuators and use of said method for compensation of actuator dynamic properties, particularly for use in compensation of creep, hysteresis and saturation in piezoelectric actuators

摘要

Method for describing the time response of actuators, whereby the actuators are described in terms of a deformation resulting from a loading, and the time response is approximated by weighted additive superposition of a number of elementary operators for describing elementary deformation processes. The invention also relates to use of the inventive method for compensation of the dynamic properties of actuators in regulation or control units, in which the inverse operator of the time response of the actuators is determined and the inverse operator is then considered as part of the control or regulation system.