发明名称 SELF-ALIGNED CONDUCTIVE LINE FOR CROSS-POINT MAGNETIC MEMORY INTEGRATED CIRCUITS
摘要 Method of forming a magnetic memory device are disclosed. In one embodiment, a first plurality of conductive lines are formed over a semiconductor workpiece. A plurality of magnetic material lines are formed over corresponding ones of the first plurality of conductive lines and a second plurality of conductive lines are formed over the semiconductor workpiece. The second plurality of conductive lines cross over the first conductive lines and the magnetic material lines. These second lines can be used as a mask to while the magnetic material lines are patterned.
申请公布号 WO02065475(A3) 申请公布日期 2003.04.03
申请号 WO2002US01918 申请日期 2002.01.24
申请人 INFINEON TECHNOLOGIES NORTH AMERICA CORP. 发明人 NING, XIAN
分类号 H01L27/105;G11C11/15;G11C11/16;H01L21/8246;H01L23/60;H01L27/22 主分类号 H01L27/105
代理机构 代理人
主权项
地址