COMPOSITE NOZZLE, LIQUID DROP DISCHARGE APPARATUS, AND METHOD FOR MANUFACTURING THEM

摘要

PROBLEM TO BE SOLVED: To provide a composite nozzle which can increase the discharge speed while holding the liquid drop position accuracy. SOLUTION: A laminated body 13 comprising a nozzle base body 24 and an adhesive layer 25 layered on the nozzle base body 24 is attached to a lower face plate 16 of a channel substrate 11. The composite nozzle 26 for discharging liquid drops is formed to a position of the nozzle base body 24 and the adhesion layer 25 corresponding to a channel terminal nozzle 16A formed to the lower face plate 16 which constitutes the channel base body 11. A discharge nozzle 24A for constituting a part of the composite nozzle 26 is formed to the nozzle base body 24. A ratio of a Young's modulus Ea of the adhesion layer 25 and a Young's modulus Es of the nozzle base body 24 (Es/Ea) is set to a range of 1.4-500. Since the adhesion layer absorbs vibrations of the nozzle base body in accordance with the discharge of liquid drops, a liquid drop meniscus can be stabilized.