METHOD AND APPARATUS FOR EVALUATING ATMOSPHERIC ENVIRONMENT

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for evaluating an atmospheric environment capable of evaluating atmospheric components stuck to a solid sample even when the exposure time of the sample to the atmospheric environment is short and obtaining information regarding the chemical state of stuck component. SOLUTION: The apparatus for evaluating the atmospheric environment is provided with an X-ray photoelectron spectroscopic unit 1 for analyzing the solid sample 14, and a conveying unit 13 for conveying the sample 14 detachable to the spectroscopic unit 1. The conveying unit 13 has a sealed container 10 for housing the sample 14, and an exhausting unit 12 for exhausting the container 10. The method for evaluating the atmospheric environment uses the apparatus.