| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure an effective power consumption of a plasma chamber load by using a circuit component value of an impedance matching device. SOLUTION: The impedance matching device is inserted between a high frequency power supply whose internal impedance Z0 is known and a plasma chamber load 3. The impedance matching device has a first variable reactance 1 for adjusting amplitude and a second variable reactance 2 for phase adjustment, and controls the respective reactance values depending on the detected value of a phase detection and amplitude detection section 6 to match them with the load impedance. The impedance matching device is also provided with a power arithmetic means that calculates the power impedance viewed from an output terminal (Out) of the impedance matching device, decides a load impedance Zc=R±jX by using its conjugate impedance, calculates a power factor Cosθ=R/√(R<2> +X<2> ) and calculates an effective power consumed by a high frequency load by using a formula P=VICosθobtained by multiplying the product of a voltage effective value V and a current effective value I at a load input terminal by the power factor Cosθ.
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