发明名称
摘要 PROBLEM TO BE SOLVED: To provide a medicinal liquid controller capable of controlling, in real time, the concn. of free components in a continuously used medicinal liquid with good accuracy. SOLUTION: An etching controller B measures the compsn. of an etchant passing a sampling vessel 6 by a first electrode 11, a second electrode 12, a thermometer 13, a pH electrode 14 and a sp. gr. meter 15. A control section 8 controls pumps 20 to 22 in accordance with the results of the measurement and adds H2 O2 and sp. gr. control water to the etchant in a liquid vessel 2, thereby maintaining the compsn. of the etchant approximately constant in real time. In addition, a titration inspection apparatus 7 takes the etchant in the liquid vessel 2 therein and executes titration inspection with the metal ions included in the etchant as a complex and, therefore, the accurate measurement of the concn. of the hydrochloric acid liberated in the etchant is made possible. The quantity of the hydrochloric acid to be added to the etchant is corrected in accordance with the measurement result in the titration inspection apparatus 7. Then, the accurate control of the compsn. of the etchant in real time is made possible.
申请公布号 JP3361981(B2) 申请公布日期 2003.01.07
申请号 JP19970352555 申请日期 1997.12.22
申请人 发明人
分类号 G01N31/00;C23F1/08;G01N27/416;H05K3/06 主分类号 G01N31/00
代理机构 代理人
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