GAS SEPARATION FILTER AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide a gas separation filter suitable for separating and concentrating a perfluoro compound gas by selectively and efficiently permeating a specific gas except the perfluoro compound gas from a gaseous mixture containing the perfluoro compound gas and the producing method therefor. SOLUTION: A gas separation filter 3 is obtained by applying to form an inorganic separation film 3 having many fine pores capable of selectively permeating and separating the specific gas except the perfluoro compound gas from the gaseous mixture containing the perfluoro compound gas and consisting essentially of silica on the surface of a ceramic porous supporting body 2 and the specific gas except the perfluoro compound gas is selectively and efficiently permeated and separated by using the gas separation filter 1 obtained by applying to form a corrosion resistant protective film 4 on the surface of the inorganic separation film 3 except the fine pore openings.