SPUTTERING TARGET AND OPTICAL INFORMATION RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a sputtering target capable of forming a thin film having a stable compsn. from the point directly after the start of use to exhaustion. SOLUTION: A compositional discontinuous face orthogonal to the thickness direction is set, and the space between the upper face which is the face on the side in which sputtering is started and the compositional discontinuous face is defined as a 1st region. Moreover, for forming a thin film contg. plural components in desired rations from the point directly after the start of use, as for each component in the 1st region part, setting is executed in such a manner that the content of the one lower in the sputtering rate is made relatively large compared to the desired ratio of the thin film.