COATING APPLICATOR

摘要

PROBLEM TO BE SOLVED: To obtain a safe coating applicator having high reliability and capable of attaining a high productivity. SOLUTION: The coating applicator for applying a coating liquid onto a substrate held to be tilted downward is constituted so that the moving region of a coating head 14 and the rotating region of a substrate holding member 12 are arranged not to spatially overlap each other by providing the rotating axial center P of the substrate holding member 12 horizontally in the direction orthogonally crossing the moving direction of the coating read 14 in the region except the upper space and the lower space of the moving region of the coating head 14 and it is constituted so that the rotation of the substrate holding member 12 and the moving of the coating head 14 are simultaneously operable.