| 摘要 |
PROBLEM TO BE SOLVED: To prevent an aligner from degrading in exposure positional accuracy due to unstable alignment of a reticule with a reticule stage. SOLUTION: A device is manufactured through a method in which a step-and- scan type aligner is utilized, wherein the misalignment of a reticule from a reticule stage is detected (deviation measuring timing) is carried out in a step operation (U-turn timing), which is carried out for the following exposure operation after a scan exposure operation is carried out. A scan exposure operation is carried out at an accurate exposure position in the following exposure (exposure timing), based on this detection result.
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