| 摘要 |
PROBLEM TO BE SOLVED: To support wafers so as to eliminate damages and dust deposition thereon as much as possible. SOLUTION: A hand 3 has a hand grip 30 to grip a wafer W at its outer periphery and a hand stem 40 connected to the hand grip 30. The hand grip 30 is formed with a fixed clamp 31 and a movable clamp 32 arranged on the fixed clamp 31 in a movable manner. A wafer guide 33 is arranged on the upper face of the fixed clamp 31 and a wafer guide 34 is arranged on the upper face of the movable clamp 32. The hand stem 40 is formed with a frame 41, a cylinder 42 arranged in the frame 41 and connected to the movable clamp 32 and a linear guide 43 to guide the movable clamp to be moved so that the movable clamp can be moved by driving the cylinder 42 to grip the wafer W with the fixed clamp 31 and the movable clamp 32. |
