| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor capable of simply discharging unnecessary substances staying in a sensor in a manufacturing process, and improving reliability by preventing the malfunction of the sensor. SOLUTION: This sensor has a structure in which a movable part, i.e., a movable electrode 15, and its weight 17 are housed inside. Through holes 18 penetrating from the inside to the outside are formed in a fixed substrate 14 on the lower side of the sensor. The through hole 18 is shaped like a taper narrowed and inclined downward, and five of them are provided at the center and the four corners of the grooved surface of the fixed substrate 14. Guide grooves 20 are formed between the through holes 18 and at the corners of the grooved surface to introduce a cleaning solvent evenly to every corner. A guide hole 19 in the shape of a cross slit at the center part of the movable electrode 15 to introduce a cleaning solvent to the upper surface side of the weight 17. A through hole 18 is formed at the center of the fixed substrate 13 on the upper side of the sensor as well to inlet a cleaning solvent from the above and to outlet it from the below. |
