| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform X-ray analysis simply and in a short time. SOLUTION: This analyzer consists of an electron microscope, an energy dispersion type X-ray analyzer and a computer for controlling them, and it indicates an electron microscope image 28 obtained by the electron microscope as well as an X-ray image 29 obtained by the energy dispersion type analyzer, on the screen of an indicator 26 connected to the computer. In this case, an analysis position 28A in the image 28 indicated on the screen is designated by a pointing device 27A, thereby emitting an electron ray to the designated position to be analyzed and allowing the energy dispersion type X-ray analyzer to start picking up of X-ray spectrum.</p> |
