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发明名称
CONTROLLER, STAGE SYSTEM, SCANNING EXPOSURE SYSTEM AND POSITIONING OF MOVING BODY
摘要
申请公布号
JPH1055955(A)
申请公布日期
1998.02.24
申请号
JP19970104517
申请日期
1997.04.22
申请人
NIKON CORP
发明人
BAUSAN YUAN
分类号
G03F7/20;G03F9/00;G05D3/12;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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