FILM FORMING METHOD OF METAL COMPOUND FILM AND FILM FORMING DEVICE TO BE USED THEREFOR,申请号JP19950196279-传众专利搜索

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发明名称	FILM FORMING METHOD OF METAL COMPOUND FILM AND FILM FORMING DEVICE TO BE USED THEREFOR
摘要
申请公布号	JPH0941133(A)	申请公布日期	1997.02.10
申请号	JP19950196279	申请日期	1995.08.01
申请人	SONY CORP	发明人	SUMI HIROBUMI
分类号	C23C14/34;C23C16/30;H01L21/203;H01L21/285;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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