发明名称 ADHESIVE SHEET AND METHOD FOR STRIPPING RESIST
摘要 PURPOSE: To obtain an adhesive sheet which can simply and surely remove a resist on an unnecessary article in the preparation of a semiconductor and a circuit. CONSTITUTION: This adhesive sheet for stripping a resist, comprises a substrate film bearing a photocurable, pressure-sensitive adhesive comprising a pressure- sensitive adhesive polymer, a nonvolatile unsatd. compd. having one or more unsatd. double bonds in its molecule, a photopolymn. initiator, and a polymn. inhibitor. The adhesive sheet is applied onto an unnecessary article with a resist pattern, and the adhesive is photocured, followed by stripping of the adhesive sheet together with the resist material.
申请公布号 JPH08302310(A) 申请公布日期 1996.11.19
申请号 JP19950129327 申请日期 1995.04.27
申请人 NITTO DENKO CORP 发明人 KIHARA YASUO;AIZAWA KAORU;OTA YOSHIO;SHIMODAN HIDEAKI;NAMIKAWA AKIRA
分类号 G03F7/42;C08F290/00;C09J4/00;C09J5/00;C09J7/02;H01L21/027;(IPC1-7):C09J7/02 主分类号 G03F7/42
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