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发明名称
POWER SUPPLY CONTROL ELEMENT AND POWER SUPPLYING METHOD FOR INSPECTING SUBSTRATE, AND SUBSTRATE INSPECTING APPARATUS
摘要
申请公布号
JPH08226949(A)
申请公布日期
1996.09.03
申请号
JP19950057949
申请日期
1995.02.21
申请人
OKANO HIGHTECH KK
发明人
YAMAOKA HIDEJI
分类号
G01R31/02;G01R31/302;(IPC1-7):G01R31/02
主分类号
G01R31/02
代理机构
代理人
主权项
地址
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