X-ray source

摘要

The x-ray source of the present invention comprises a charged particle beam generator (112) and a vacuum enclosure assembly (176). The charges particle beam generator includes only a single electrical connection (803) for providing high voltage to the electron gun. The generated charged particle beam is controlled through a series of dynamic and static focus coils (187, 185) and moved across the inner face of the target (50) by a stepping coil assembly comprising X and Y deflection coils (190) as well as an X step and preferably Y step coils (188). Further, to minimize power usage a control grid pinches off the charged particle beam during the steppimg of the beam.