| 摘要 |
PURPOSE:To provide a manufacturing method of a biological sample for a scanning electron microscope without the deformation of the sample, a device therefor, and a biological sample observaing method. CONSTITUTION:A control device 14 sends a cooling signal to a power supply 16. As a result, a sample holder 11 positioned on a thermo-module is cooled, and a sample 12 is also cooled. The control of the control device 14 stopping the supply of the cooling signal at the time of -45 deg.C is based on the data stored in a memory 15. The control device 14 sets the vacuum degree of a sample chamber 2 to a low vacuum state between 0.01Torr and 2Torr, and the control device 14 sends a heating signal to the power supply 16. The heating temperature of the sample 12 gradually rises and stops when the temperature of the sample 12 reaches 15 deg.C. Upon terminating such treatment of the sample 12, electron beams irradiate the sample 12 in the low vacuum state, and a sample image is displayed on a display device on the basis of the reflected electrons emitted from the sample 12. |
