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法人/股东/高管

发明名称
摘要
申请公布号	JPH0685394(B2)	申请公布日期	1994.10.26
申请号	JP19860013785	申请日期	1986.01.27
申请人	CANON KK	发明人	SHOJI TATSUMI;FURUSHIMA TERUHIKO;MORIMOTO KENJI;FUKAYA MASAKI
分类号	H01L21/205;C23C16/505;H01L21/31;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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