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发明名称
KALIBRIERPUNKTE FÜR DIE AUSRICHTUNG EINES WAFER-PRÜFKOPFES.
摘要
申请公布号
DE3689140(T2)
申请公布日期
1994.02.03
申请号
DE19863689140T
申请日期
1986.04.07
申请人
SGS-THOMSON MICROELECTRONICS, INC. (N.D.GES.DES STAATES DELAWARE), CARROLLTON, TEX., US
发明人
LEUSCHNER, HORST, PHOENIX, AZ 85023, US
分类号
G01B21/00;G01N21/88;G01N21/956;G01R31/00;G01R35/00;G03F1/00;H01L21/027;H01L21/66;(IPC1-7):G01R31/00
主分类号
G01B21/00
代理机构
代理人
主权项
地址
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