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发明名称
A METHOD FOR MEASURING IMPURITY CONCENTRATIONS IN A LIQUID AND AN APPARATUS THEREFOR
摘要
申请公布号
EP0242564(B1)
申请公布日期
1993.09.15
申请号
EP19870103498
申请日期
1987.03.11
申请人
NIHON KAGAKU KOGYO CO., LTD.;NOMURA MICRO SCIENCE CO., LTD.
发明人
KOHSAKA, YASUO;NIIDA, TOHRU;SATO, HISAO;KANO, HAJIME
分类号
G01N15/14;G01N15/00;G01N15/06;G01N33/18
主分类号
G01N15/14
代理机构
代理人
主权项
地址
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