| 摘要 |
PURPOSE:To enhance the energy efficiency and to shorten a charging duration of a primary capacitor by a high-voltage power supply by a method wherein a rectifier circuit which makes an electric current flow from a ground to the high-voltage power supply is installed between the high-voltage power supply of the primary capacitor of a pulsed gas laser device and the ground. CONSTITUTION:If a primary capacitor 2 is charged by a high-voltage power supply 1, a high-voltage switch 3 is closed and the capacitor is discharged. This electric energy is charged in a secondary capacitor 6; then, a preliminary discharge electrode 5 is discharged. A main discharge electrode 4 starts discharging in a medium which has been ionized by a preliminary discharge of the preliminary discharge electrode 5; a laser beam is radiated. If the main discharge electrode 4 is discharged, an aftercurrent is generated; an electric current flows forward and backward through a damper circuit 7; one direction of this aftercurrent flows from a ground 8 to the high-voltage power supply 1 in a rectifier circuit 9; the primary capacitor 2 is charged; accordingly, it is possible to enhance the energy efficiency and to shorten a charging duration of the primary capacitor by the high-voltage power supply. |
