发明名称 CRYSTAL PULL UP METHOD
摘要 A pulling shaft carries a seed crystal holder and moves it vertically to pull a crystal upward from a melt in a crucible. The pulling shaft is rotated by a drive to cause the crystal to rotate while being pulled. A slippage device is provided to permit a difference between rotational speeds of the pulling shaft and the seed crystal. The slippage device may be incorporated in a crystal holder having an inner holder fixed to the seed crystal, an outer holder fixed to the shaft, and a friction bearing therebetween which prevents undue torsional stress from being transmitted to the crystal.
申请公布号 JPH05221785(A) 申请公布日期 1993.08.31
申请号 JP19920187815 申请日期 1992.07.15
申请人 LEYBOLD AG 发明人 DEIITAA DOREKUSERU
分类号 C30B15/30;C30B15/32;H01L21/208 主分类号 C30B15/30
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