| 摘要 |
<p>PURPOSE:To protect a specified wafer against dust and cracks by containing the specified wafer such as a controlling wafer in a case and by containing it in a case containing part. CONSTITUTION:A plurality of treatment wafers 4 are contained in a wafer carrier 2 and mounted on a wafer carrier table 6. A controlling wafer 8 is contained in a wafer case 10 and a wafer case containing space 12 wherein the wafer case 10 is contained removably is formed in the wafer carrier table 6. When a semiconductor device is adjusted and inspected, there is no possibility to generate measurement error. Since a specified wafer such as a controlling wafer is positioned in a case containing part, that is, in a position which is different from that of a treatment wafer, it is not necessary to change a wafer and a device can be controlled automatically.</p> |
