| 摘要 |
PURPOSE:To prevent a thermal damage at a capillary or near it and achieve a high output of a laser tube by forming the entire capillary with diamond or a diamond-shaped carbon film or coating what is made of a heat-resistance material with diamond or the diamond-shaped carbon film. CONSTITUTION:Diamond is allowed to grow around a capillary 2 by the heat filament CVD method and a base material is dissolved after growth. Then, it is mounted to a disc-shaped member 3 which consists of aluminum nitride. Then, a plurality of these disc-shaped members 3 are connected in series by a metal connection member 5, metal tube members 6 and 7 are provided at both edges, and then electrodes 8 and 10 are installed, thus enabling heat resistance, thermal conductivity, and sputter resistance of the capillary part to be improved and oscillation on a high-output ion user owing to improved resistance against an extremely high temperature. |
