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发明名称
METHODE PERMETTANT DE DEPOSER UNE COUCHE MINCE PAR PHOTO-ABLATION
摘要
申请公布号
LU87880(A1)
申请公布日期
1992.10.15
申请号
LU19910087880
申请日期
1991.01.24
申请人
COMMUNAUTE ECONOMIQUE EUROPEENNE (CEE)
发明人
JOSEPH-ALBERT MIEHE;JEAN-CLAUDE GROSSETIE;FRANCINE HEISEL;ERIC FOGARASSY;CLAUDE FUCHS
分类号
C23C14/28;(IPC1-7):H01L/
主分类号
C23C14/28
代理机构
代理人
主权项
地址
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