| 摘要 |
PURPOSE:To control a testing tank to prevent the generation of a saturaton state or the like as atmosphere thereinside otherwise causing an adverse effect on a sample, by continuing testing conditions after the end of a test. CONSTITUTION:An environment tester 20 for a semiconductor or the like is made up of a chamber body 21 insulated with a heat insulator, a testing tank 23 divided with a partition 22 and a temperature/humidity adjusting chamber 24. The temperature/humidity adjusting chamber 24 is provided with a blow off port 25, a blower 31, a heater 32, a cooler 33, a dehumidifier 34 and a humidifier 35. An operation mechanism 1 for performing equipments is controlled with an environment test operation control section C1 and a continuous operation control section C2 to be allowed to continue the operation thereof even after the environment testing, only if a continuous operation setting switch is turned ON. The continuous operation can be performed until a stop key 7 is closed. This enables the inside of the testing tank to be kept at a specified temperature and humidity even after the end of the environment testing operation thereby eliminating adverse effect on a sample. |
