| 摘要 |
PURPOSE:To control the thickness of a coating film in a highly accurate manner using the least possible energy by a method wherein, when a resist is applied using an injection nozzle while a substrate is being rotated by a spin motor, a temperature sensor is provided at the nozzle part, an arithmetic operation is performed on the change in viscosity of resist generating due to temperature variation, and the revolutional speed of the motor is corrected properly. CONSTITUTION:The substrate 5 is rotated using the spin motor 6, the resist sent from an injection nozzle 4 is sprayed on the substrate, and a resist film is formed on the substrate 5. According to this constitution, a temperature sensor 7 is newly provided on the nozzle 4, the detected signal of said temperature sensor is outputted to an arithmetic operational unit 9 through the intermediary of an interface 8, and the temperature deviation is converted into the viscosity variation. Besides, a calculation is performed to obtain the thickness of coated film at what number of revolution, and based on the result obtained, the number of revolution of the motor 6 is corrected using a motor drive 10, a revolution number sensor 11 and a revolution sensor interface 12. Then, a resist film of constant thickness can be obtained even when the temperature of resist changes. |
