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发明名称
MANUFACTURE OF ELECTRODE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04146623(A)
申请公布日期
1992.05.20
申请号
JP19900271266
申请日期
1990.10.09
申请人
SEIKO EPSON CORP
发明人
KARASAWA YASUSHI
分类号
C23C18/31;H01L21/28;H01L21/288;H01L21/321;H01L21/60
主分类号
C23C18/31
代理机构
代理人
主权项
地址
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