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发明名称
PARTICLE COUNTER
摘要
申请公布号
JPH03272437(A)
申请公布日期
1991.12.04
申请号
JP19900074001
申请日期
1990.03.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
TOHATA KAZUYA
分类号
G01F1/34;G01N15/12;G01N15/14
主分类号
G01F1/34
代理机构
代理人
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