| 摘要 |
PURPOSE:To prevent the deterioration of machining quality by detecting a lowering of reflectance of a reflection mirror and inputting a correction value obtained from the reflectance, a discharge current and initial laser beam output to a laser beam power source via a current control circuit. CONSTITUTION:A laser beam 2 is emitted from a laser beam generator (resonator) 6 where a set value of an output setter 7 is compared with a detection value of the discharge current to control the discharge current to a specified value. The laser beam 2 is led to a condenser lens 4 via the reflection mirror (beam splitter) 13 and a work 5 is irradiated and machined therewith. The lowering of reflectance of the reflection mirror 13 is then detected by a photodetector 11. The correction value of the discharge current obtained from the reflectance of the reflection mirror 13 and characteristics of the discharge current and the initial laser beam output inputted in advance is inputted to the laser beam power source 8 by an arithmetic correction circuit 12 via the current control circuit 9. By this method, a lowering of the intensity of the laser beam with which the work is irradiated can be prevented. |
