发明名称 DYNAMIC RAM STORGE ELEMENT AND ITS MANUFACTURE
摘要 PURPOSE: To substantially lessen a memory device in surface area by a method, wherein transistors are provided onto the main surface of a substrate, and capacitors are provided in the substrate surrounding trenches. CONSTITUTION: Word lines such as word lines 3-1 to 3-4 are connected to the gates of transfer gate transistors 1-1-1 to 1-2-2 of memory devices in each row. By this setup, a read amplifier is provided with a comparator equipped with two input terminals, one is connected to an adjacent bit line such as a bit line 4-1 and the other is connected to an adjacent bit line such as a bit line 4-2. When a high-voltage signal is applied to a word line 3-3 while a memory device is kept in operation, the transistor 1-1-2 is turned on, and then the capacitor 2-1-2 is connected to a bit line 4-1. When write signals are applied to a bit line 4-1, the signals are stored in a capacitor 2-1-2, and signals fed to word line 3-3 are turned to logic zero, so that signals supplied to the bit line 4-1 are completely stored in the capacitor 2-1-2.
申请公布号 JPH03129769(A) 申请公布日期 1991.06.03
申请号 JP19900123982 申请日期 1990.05.14
申请人 TEXAS INSTR INC <TI> 发明人 YASHIRO MASAAKI;MORINAGA SHIGEKI;KURARENSU WANNFUSHINGU TENGU
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L27/04
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