Charge transfer device having MIM structures and method for driving the same.

摘要

There is provided a one-dimensional MIM array having MIM structures (15) arranged on an insulative substrate (11) in a lateral direction and each used as a unit for storing a signal charge, for sequentially storing and transferring the signal charges between the adjacent MIM structures (15). With the above element structure, the signal charge is transferred in each of the MIM structures (15) in a thickness direction (depth direction) thereof and stored in a capacitor (16). The signal charge stored in the capacitor (16) is sequentially transferred in a lateral direction or to the next MIM structure (15). In order to drive the above charge transfer device, transfer pulses applied to a plurality of MIM structures (15) constituting a one-dimensional MIM array are controlled to sequentially transfer and store the signal charges into the MIM structures starting from the MIM structure which is provided on the output terminal side of the one-dimensional MIM array. At the time of reading out the signal charge, signal charges are sequentially read out and transferred from the MIM structures starting from the MIM structure which is provided on the output terminal side.