System for facilitating planar probe measurements of high-speed interconnect structures,申请号US19900491569-传众专利搜索

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发明名称	System for facilitating planar probe measurements of high-speed interconnect structures
摘要
申请公布号	US4994737(A)	申请公布日期	1991.02.19
申请号	US19900491569	申请日期	1990.03.09
申请人	CASCADE MICROTECH, INC.	发明人	CARLTON, DALE E.;JONES, KEITH E.;MYERS, THOMAS A.
分类号	G01R1/06;G01R31/00;G01R31/26;G01R31/28;G06F13/00;H01L21/66	主分类号	G01R1/06
代理机构		代理人
主权项
地址

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