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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH02190782(A)
申请公布日期
1990.07.26
申请号
JP19890011316
申请日期
1989.01.20
申请人
NEC CORP
发明人
ONDA YUTAKA
分类号
G01R31/26;G01R31/28;G01R31/30;G01R31/3185;H01L21/66;H01L21/822;H01L27/04
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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