摘要 |
PURPOSE:To obtain a titled member of superior electrical, optical, and photoconductive characteristics and use environment characteristics by providing an amorphous layer consisting of a specific lower layer, an intermediate layer and an upper layer on a substrate for electrophotography having a surface of Al2O3 contg. water of crystallization. CONSTITUTION:A barrier layer 102 of 30-1,000Angstrom consisting of an amorphous material[e.g.; a-SiaC1-a(0<a<1)]is provided according to need on a substrate 101 for electrophotography having an Al2O3 layer of 0.05-10mu thickness contg. water of crystallization. A photoconductive amorphous layer 103 consisting of a lower layer region 104 in which O is distributed uniformly in the layer thickness direction at a distribution amt. C1, an intermediate layer region 105 in which O is distributed uniformly in the layer thickness direction at a distribution amt. C2 and an upper layer region 106 in which O is dristributed uniformly in the layer thickness direction at a distribution amt. C2, wherein the magnitude relations thereof are C3<C1, C2 and consisting of an amorphous material contg. H or halogen and consisting basically of Si is formed thereon. |