发明名称 |
Method and apparatus for the manufacture of superconducting oxide materials. |
摘要 |
<p>A sputtering apparatus for producing a thin film of a superconducting oxide material comprises a pair of sputter targets of compacted superconducting material which are mutually separated and opposed to each other so as to define a region wherein a substrate which is required to be coated with sputtered material may be located, and means for subjecting such substrate to the action of a magnetic field oriented perpendicular to or parallel with the substrate surface whereby crystal orientation is caused to occur during the growth of the film.</p> |
申请公布号 |
EP0309294(A2) |
申请公布日期 |
1989.03.29 |
申请号 |
EP19880308904 |
申请日期 |
1988.09.26 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI, SHUNPEI |
分类号 |
C23C14/08;C23C14/35;H01L39/24 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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