| 摘要 |
PURPOSE:To make it possible to detect defects and to judge the quality of a chip for the corner parts and the entire sides of the chip by setting the size of the chip to be checked with a quantized image through an optoelectronic transducer means beforehand, dividing the checking range based on the preset value, and determing the range. CONSTITUTION:A region to be checked 11 is scanned with an optoelectronic transducer mechanism 1, and the result is stored into an image memory part 2. A semiconductor chip 12 is arranged in the region to be checked 11. A chip-size setting part 4 sets a chip size mask 13 on the semiconductor chip 12 based on the instruction from a control part 10. Checking ranges 14 are set as M and N with a checking area setting part 5. Checking segments (a, b, c...p), which are provided in M and N, are provided by dividing the checking ranges 14. The size of the segment is set with an checking segment setting part 6 in correspondence with the sizes of cracks and broken parts yielded in the semiconductor chip 12. When the checking range 14 for judging the quality are set so that M=8 picture elements and N=8 picture elements, the count of the picture elements of the checking segments becomes 32. When a defect is not found, the count of the picture elements of the checking segments (a...f) and (k...p) is 32.
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