| 摘要 |
PURPOSE:To reduce the sticking of a vaporized material on a window lens, and to stabilize and rationalize coating operation by arranging a beltlike, extremely thin plate in contact with the opening part at the tip of a protection cylinder and boring only an irreducible hole corresponding to the output of a laser beam. CONSTITUTION:The laser beam 1a is projected so as to start ceramic coating, and then the hole 13 is bored firstly in the extremely thin plate 13 to a diameter corresponding to the output of the laser beam 1a; and the laser beam 1a is further projected on a ceramic member 6, etc., through the hole 13a and the vaporized material 16 is vapor-deposited on a substrate. At this time, the amount of the vaporized material 61 scattered from the opening part at the tip of the protection cylinder 12 to the window lens 4 becomes a little because the material is cut off by the extremely thin plate 13 and the sticking of the material on the window lens 14 is greatly reduced. Further, when the output of the laser beam 1a is varied, the hole 13a is reworked (expanded) in the extremely thin plate 13 in said state if the laser beam increases in output to secure the effect for sticking prevention continuously.
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