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发明名称
ION PROCESSING DEVICE
摘要
申请公布号
JPS62190644(A)
申请公布日期
1987.08.20
申请号
JP19860031257
申请日期
1986.02.15
申请人
NISSIN ELECTRIC CO LTD
发明人
SASAMURA YOSHITAKA
分类号
H01L21/302;H01J37/317;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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