| 摘要 |
PURPOSE:To test a chip in a wafer by one-time probing in the whole test items by mounting an ultraviolet-ray generator to the upper section of an opening section in a probe card brought into contact with an electrode in the chip. CONSTITUTION:An ultraviolet-ray generator 6 projects ultraviolet rays to the wafer for conducting a different writing test to an ultraviolet erasing type programmable ROM UVPROM again, erases written informations, is mounted to the upper section of a probe card 4 and is brought into contact with an electrode in a chip by a probe needle 3. When a first writing test is completed, a prober 12 starts the ultraviolet-ray generator 6 by an erasing signal from a tester 11, and projects ultraviolet rays to a chip to which measurement is completed. Informations written by the first writing test are erased by the projection, and processes shift to a process of a second writing test 1. |
