| 摘要 |
PURPOSE:To make it possible to observe a sample of large-sized sheet shape by providing a sample chamber able to house the sample of large-sized sheet shape formed while being surrounded by a magnetic path and making its whole and a sample exchange chamber rock-removing the sample of large-sized sheet shape. CONSTITUTION:A sample carrier 8 is moved from a sample chamber 6 to a sample exchange chamber 10 by using a knob 12. After fixing a semiconductor wafer onto the sample carrier 8 while opening a cover 11 of the sample exchange chamber 10, the sample carrier 8 is sent into a sample chamber 6 by using the knob 12. A bloc 3a returns by said operation for becoming a magnetic path 3. In said state, the device inside is vacuumized for generating the primary electron rays 26. The objective lens 1 is excited by an excitation coil 5 while scanning the surface of the sample 7 while using the deflection coils 28a and 28b. The secondary electron rays 27 are detected by a detector 29 for being observed by a similar method to an ordinary scanning type electron microscope. The movement of the sample 7 is performed from outside by operating the knobs 15 and 20. |
