METHOD FOR STABILIZING ELECTRIC CURRENT FOR SPUTTERING

摘要

PURPOSE:To keep accurately electric current for sputtering constant by detecting a change in the electric current and feeding back it to a mass flowmeter. CONSTITUTION:An ammeter 16 for detecting electric current for sputtering flowing from a power source 14 is placed. When voltage is kept constant and the internal pressure of a sputtering vessel 1 is made variable, the electric current changes linearly in proportion to the internal pressure of the vessel 1. The internal pressure of the vessel 1 also changes linearly in proportion to the flow rate of gas introduced from a pipe 12. An output corresponding to the electric current detected with the ammeter 16 is fed from the ammeter 16, and the degree of opening of a mass flowmeter 13 is controlled in accordance with the output to regulate the electric current for sputtering.