| 摘要 |
PURPOSE:To simplify the structure and reduce its size by providing a supporting function for a table by an elastic column and a rotary recovering function by the torsional restoration force of the elastic column. CONSTITUTION:A micromotion table 3 is constituted integrally on a fixed base 1 through the elastic column 2. The column 2 is a hollow cylinder having specific cylinder wall thickness and restores itself to the original shape by elastic force when twisted. Equal angle position support pieces 31, 31, and 31 are projected from the outer periphery of the table 3, and actuators 4, 4a, and 4b for micromotion which expand and contract by being impressed with a voltage like a piezoelectric element are fitted on the fixed base 1 opposite the support pieces 31, 31, and 31 and corresponding to the table in linear directions. The respective actuators have a spherical projection part 41 atop and are pressed against and coupled with the support pieces 31, 31, and 31 in spot contact. |
